DuPont Vespel ® Polyimide Shapes

DuPont Vespel ® Polyimide Shapes

Proven Solutions for Semiconductor Processing

 

DuPont Vespel® polyimide parts have a documented record of reliability and durability in wafer handling, wafer processing, IC handling and testing and other

semiconductor manufacturing processes. Vespel® offers an alternative to ceramics, quartz and unproven types of plastics while reducing ownership costs with extended life

in the chamber and longer maintenance intervals. Super clean to improve die yields Vespel® gives you the cleanliness needed to deliver consistently high yields. DuPont process research and manufacturing controls have kept pace with the fab’s needs for ever cleaner materials. Vespel® parts are offer extremely high purity, negligible trace metal content, virtually no particulate shedding in plasma and insignificant outgassing properties. To meet ever tightening contamination requirements, DuPont is continuously improving the cleanliness of Vespel® parts. For more than 30 years, Vespel® parts have provided a unique combination of strength, toughness and low wear to withstand the rigors of repeated handling, cleaning cycles, mechanical abuse and permanent deformation. And their good compliance allows reliable sealing.

 

Temperature Performance

Vespel® parts serve reliably at temperatures up to 288°C (550°F) in many applications. For limited periods, they can endure temperatures of 482°C (900°F) or more. Elevated temperatures have little effect on mechanical properties such as tensile strength, elongation, flexural modulus and  compressive strength.

 

Wear and Friction Resistance

With low friction and superior wear performance over a broad temperature range, Vespel® parts are a good choice for sliding contact and applications where interfacial

temperatures are high.

 

Holds Close Tolerances

Compared with other polymer components, Vespel® parts provide superior dimensional

stability. Vespel® has no observable softening or melting point, and its coefficient of thermal expansion is low. Creep resistance is high.

 

Resists Chemical Attack

Vespel® parts are compatible with most gases typically used in key semiconductor process vessels, including epitaxial reactors, photoresist developers, dry etchers and ion

implanters. Most solvents, etchants, electronic chemicals, vacuum fluids and hydraulic oils have no significant effect on Vespel® parts.

First-Class Electrical Insulators

Vespel® parts provide the excellent dielectric properties required for semiconductor

processing components

 

Wafer Processing

Wherever a wafer process requires resilient, long-wearing parts to cushion, dampen or isolate, Vespel® usually provides a viable solution.  Candidate applications include crystal slicing, photoresist applications, dry etching and ion implantation.

 


Wafer Clamping Rings

Used in oxide etching, the Vespel® clamping ring

withstands extremely aggressive conditions.

It maintains strength, resilience and dimensional

stability at operating temperatures of 288°C (550°F),

high plasma energy, and vacuum to 10-9 torr.

Service life depends on chamber conditions,

including types of etchant gases.

 

Insulators

Vespel® parts work as both thermal and electrical insulators. The insulators separate

wafers from a stainless steel pedestal during ion implantation. The use of Vespel® minimizes contamination and extends service life with high process yield and reduced downtime.

 

Screws & Fasteners

Vespel ® screws and fasteners are used in conjunction with Vespel ® Wafer Clamping rigs or Vespel Confinement Rings to provide a consistent material system.  Vespel ® is suitable to handle the torque necessary for fastening and tightening of screws.  It’s stability and strength allow for easy part replacement.

 


Clamping Finger

These replaceable fingers are used in aftermarket

wafer clamping rings to extend part life and reduce

overall cost of use by allowing users to replace the

fingers rather than the entire rings.

 

Bearings, Centering Pins, Alignment Pins

Vespel® bearings and centering pins require no lubrication and exhibit low friction as key parts for implantation of impurity atoms.  The bearing retainer is a special composition of Vespel® tailored for superior wear resistance in a vacuum environment.

 

Vacuum Pads

Attached to robot arms, Vespel® pads hold wafers while they are removed from various processing setups.

 

Wafer Handling

Automated wafer handling systems require contact

surfaces that are resilient, long wearing, free of particulate

and dimensionally stable.  Because Vespel® parts

can meet all these requirements, they are widely used in

 vacuum pickup systems, carrying devices and positioning

assemblies.

 

Wafer Guides

These Vespel® guides withstand process temperatures up

to 288°C (550°F) without damage or deformation. The

resilience of Vespel® and its low thermal conductivity

help avoid buildup of thermal stresses in wafers.

And Vespel® minimizes particulate contamination.

 

Vacuum Pickup Strips and Tips

Vespel® parts only 1 to 3 mm thick are milled

to permit air passages and bonded to stainless

steel in such applications. Vespel® meets needs

for strength to hold up in such thin sections and

resilience to help protect wafers from handling damage.

 

Wafer Carriers

As wafer carriers and wafer contact surfaces in

such carriers, Vespel polyimide far outperforms

various other polymer components in resistance to

elevated temperatures and process conditions.

Vespel wafer carriers utilize intricate design features,

including slots and undercuts, which are easily machined

to close tolerances.

 

Probe Check Insulators

In holding wafers during testing of individual circuit chips, these Vespel® components help minimize contamination and hold the close tolerances needed for precise positioning for testing.

 

IC Handling and Testing

Vespel® provides the excellent dielectric performance and mechanical properties needed in apparatus for handling and testing integrated circuits in packaging operations.

 


Die-Pickup Collets

For handling diced chips during packaging, Vespel®

collets meet needs for resilience and cleanliness.

These parts are easily machined to the precise

tolerances required.

 

Test Sites and Holders

In these thin-walled components, Vespel® provides

excellent dielectrics and outperforms ceramics in

strength, toughness and resilience to protect circuits

from damage during testing. In some cases,

metal contacts are adhesive-bonded in place.

The Vespel® parts also fill the need for dimensional

stability over a wide range of test temperatures.

Insulators and Wear Strips

Used during testing and packaging steps, these Vespel® parts resist wear and have low friction against components made of other materials. Their configuration attests to the feasibility of machining Vespel® with high precision.

 

For more information on Vespel ® or other high-performance plastics used in the semiconductor industry, please contact Professional Plastics, Inc.

 

PROFESSIONAL PLASTICS, INC.

(800) 766-7767

sales@proplas.com

www.professionalplastics.com

 

 

Copyright 2007, all rights reserved.

 

 

Vespel ® is a registered tradename of E.I. DuPont De Nemours.

 

Professional Plastics, Inc. is an independent supplier of high-performance plastic sheets, rods, tube and films. We do not claim to directly represent, or act on behalf of E.I. DuPont de Nemours or any other manufacturer who's products are represented on this website. Products listed on this website are intended for the material design and specification process, as well as, a listing of typical materials offered for sale.

 

 

 

 

http://www.professionalplastics.com/professionalplastics/content/DuPontVespel-SemiconductorBrochure.pdf
http://www.professionalplastics.com/cgi-bin/pp.pl?pgm=co_disp&func=displ&strfnbr=3&prrfnbr=85585&sesent=0,0&srch_pid=97275&search_id=84956
Home